Emerging semiconductor technology/ Editor by Dinesh C.Gupta, Paul H.Langer
Tác giả : Editor by Dinesh C.Gupta, Paul H.Langer
Nhà xuất bản : ASTM
Năm xuất bản : 1987
Nơi xuất bản : Philadelphia
Chủ đề : 1. Emerging. 2. Semiconductor. 3. Semiconductor industry. 4. Sience technique. 5. Technology.
Thông tin chi tiết
| Tóm tắt : | This book is organized into seven sections:Standards for semiconductor industry, Epitaxial technology, Dielectrices and junction formation techniques, Plasma technology and other fabrication techniques, Material defects, Oxygen and carbon in silicon,Yield enhancement and contamination control aspects, Dopant profiling techniques and in-process measurement, and fab equipement . |