Semiconductor fabrication:technology and metrology/ Editor by Dinesh C.Gupta
Tác giả : Editor by Dinesh C.Gupta
Nhà xuất bản : ASTM
Năm xuất bản : 1989
Nơi xuất bản : Philadelphia
Chủ đề : 1. Fabrication. 2. Metrology. 3. Semiconductor. 4. Sience technique. 5. Technology.
Thông tin chi tiết
| Tóm tắt : | This book is organized into six sections:Crystal growth and epitaxial deposition techniques,Fabrication technology, Microcontamination,Metallization and interconnects,Material defects and gettering and Control chart, standards and specifications. |