Gate dielectric integrity: Material, process, and tool qualification/ Edited by Dinesh C. Gupta and George A. Brown
Tác giả : Edited by Dinesh C. Gupta and George A. Brown
Nhà xuất bản : American society for testing and materials
Năm xuất bản : 2000
Nơi xuất bản : PA
Mô tả vật lý : 169p; 22cm
Chủ đề : 1. Circuits. 2. Dielectrics. 3. English. 4. Integrated circuits. 5. Materials. 6. Oxide. 7. Reliability. 8. Scale integration. 9. Semiconductor. 10. Silicon. 11. Wafer.
Thông tin chi tiết
| Tóm tắt : | This book consists of gate oxide reliability assessment and some connections to oxide integrity, ultra-thin film dielectrics reliability characterization, voltage step stress for 10nm oxides, localized charging damage in thin oxides, characterization of gate dielectrics with mercury gate Mos current-voltage measurements... |