Principles of growth and processing of semiconductors/ S. Mahajan
Tác giả : S. Mahajan
Nhà xuất bản : WCB
Nơi xuất bản : Boston
Mô tả vật lý : 512p; 24cm
Chủ đề : 1. Defects. 2. English. 3. Ion. 4. Oxidation. 5. Physics. 6. Semiconductors.
Thông tin chi tiết
| Tóm tắt : | This book is about semiconductors, principles of semiconducting devices, defects, evaluation of semiconductors, growth of bulk crystals, expitaxial growth, oxidation, diffusion, ion implantation, metallization, lithography and etching, challenges in growth and processing of semiconductors. |